Yi, Xiaofeng; Wang, Di; Li, Fan; Zhang, Jian; Zhang, Lei published the artcile< Molecular bixbyite-like In12-oxo clusters with tunable functionalization sites for lithography patterning applications>, Recommanded Product: Indium(III) chloride tetrahydrate, the main research area is indium oxo cluster mol bixbyite lithog patterning application.
Indium oxides have been widely applied in many technol. areas, but their utilization in lithog. has not been developed. Herein, we illustrated a family of unprecedented In12-oxo clusters with a general formula [In12(Μ4-O)4(Μ2-OH)2(OCH2CH2NHCH2CH2O)2(OR)4X4]X2 (where X = Cl or Br; R = CH3, C6H4NO2 or C6H4F), which not only present the largest size record in the family of indium-oxo clusters (InOCs), but also feature the first mol. model of bixbyite-type In2O3. Moreover, through the labile coordination sites of the robust diethanolamine-stabilized In12-oxo core, these InOCs can be accurately functionalized with different halides and alc. or phenol derivatives, producing tunable solubility Based on the high solution stability as confirmed by ESI-MS anal., homogeneous films can be fabricated using these In12-oxo clusters by the spin-coating method, which can be further used for electron beam lithog. (EBL) patterning studies. Accordingly, the above structural regulations have significantly influenced their corresponding film quality and patterning performance, with bromide or p-nitrophenol functionalized In12-oxo clusters displaying better performance of sub-50 nm lines. Thus, the here developed bixbyite-type In12-oxo cluster starts the research on indium-based patterning materials and provides a new platform for future lithog. radiation mechanism studies.
Chemical Science published new progress about Atomic force spectroscopy. 22519-64-8 belongs to class chlorides-buliding-blocks, and the molecular formula is Cl3H8InO4, Recommanded Product: Indium(III) chloride tetrahydrate.
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